{"id":407,"date":"2026-02-15T09:00:00","date_gmt":"2026-02-15T01:00:00","guid":{"rendered":"https:\/\/twtip.com\/?p=407"},"modified":"2026-02-21T00:50:08","modified_gmt":"2026-02-20T16:50:08","slug":"euv-lithography-explained","status":"publish","type":"post","link":"http:\/\/www.twtip.com\/?p=407","title":{"rendered":"EUV \u5fae\u5f71\u6280\u8853\uff1a\u5982\u4f55\u5be6\u73fe 2nm \u88fd\u7a0b\u7684\u5948\u7c73\u7d1a\u5716\u6848\uff1f"},"content":{"rendered":"<p>\u6975\u7d2b\u5916\u5149\uff08EUV\uff09\u5fae\u5f71\u662f\u5be6\u73fe 7nm \u4ee5\u4e0b\u5148\u9032\u88fd\u7a0b\u7684\u95dc\u9375\u8a2d\u5099\uff0c\u76ee\u524d\u7531\u8377\u5546 ASML \u7368\u5bb6\u4f9b\u61c9 [citation:1][citation:9]\u3002<\/p>\n<p><strong>\u4ec0\u9ebc\u662f EUV\uff1f<\/strong><\/p>\n<p>\u50b3\u7d71\u6df1\u7d2b\u5916\u5149\uff08DUV\uff09\u4f7f\u7528 193nm \u6ce2\u9577\u7684\u5149\u6e90\uff0c\u8981\u523b\u51fa\u66f4\u5c0f\u7684\u96fb\u6676\u9ad4\u9700\u8981\u591a\u91cd\u5716\u6848\u5316\uff0c\u6b65\u9a5f\u7e41\u96dc\u3001\u6210\u672c\u9ad8\u3002EUV \u4f7f\u7528 13.5nm \u6ce2\u9577\u7684\u6975\u7d2b\u5916\u5149\uff0c\u55ae\u6b21\u66dd\u5149\u5c31\u80fd\u523b\u51fa\u66f4\u7cbe\u7d30\u7684\u7dda\u8def\uff0c\u5927\u5e45\u7c21\u5316\u88fd\u7a0b\u3002<\/p>\n<p><strong>High-NA EUV \u662f\u4ec0\u9ebc\uff1f<\/strong><\/p>\n<p>2026 \u5e74\uff0cASML \u958b\u59cb\u51fa\u8ca8\u65b0\u4e00\u4ee3 High-NA\uff08\u9ad8\u6578\u503c\u5b54\u5f91\uff09EUV \u8a2d\u5099\uff0c\u6578\u503c\u5b54\u5f91\u5f9e 0.33 \u63d0\u9ad8\u5230 0.55\uff0c\u53ef\u652f\u63f4 2nm \u4ee5\u4e0b\u7bc0\u9ede\u7684\u55ae\u6b21\u66dd\u5149\u5716\u6848\u5316 [citation:1]\u3002<\/p>\n<p>High-NA EUV \u7684\u6311\u6230\u5728\u65bc\uff1a<\/p>\n<ul>\n<li><strong>\u5149\u6e90\u529f\u7387<\/strong>\uff1a\u9700\u8981\u66f4\u9ad8\u529f\u7387\u7684\u96f7\u5c04\u7522\u751f\u8db3\u5920\u7684\u5149\u5f37\u5ea6<\/li>\n<li><strong>\u5149\u7f69\u5c3a\u5bf8<\/strong>\uff1a\u5149\u7f69\u5c3a\u5bf8\u653e\u5927\uff0c\u9700\u8981\u5168\u65b0\u7684\u50b3\u8f38\u7cfb\u7d71<\/li>\n<li><strong>\u5149\u963b\u5291<\/strong>\uff1a\u9700\u8981\u958b\u767c\u65b0\u7684\u5149\u963b\u6750\u6599<\/li>\n<\/ul>\n<p>\u82f1\u7279\u723e\u662f High-NA EUV \u7684\u9996\u6279\u5ba2\u6236\uff0c\u7528\u65bc 18A \u53ca\u5f8c\u7e8c\u88fd\u7a0b\uff1b\u53f0\u7a4d\u96fb\u548c\u4e09\u661f\u4e5f\u8a08\u5283\u5728 2nm \u4ee5\u4e0b\u7bc0\u9ede\u5c0e\u5165 [citation:1]\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u6975\u7d2b\u5916\u5149\uff08EUV\uff09\u5fae\u5f71\u662f\u5be6\u73fe 7nm \u4ee5\u4e0b\u5148\u9032\u88fd\u7a0b\u7684\u95dc\u9375\u8a2d\u5099\uff0c\u76ee\u524d\u7531\u8377\u5546 ASML \u7368\u5bb6\u4f9b\u61c9 [citatio [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[4],"tags":[],"class_list":["post-407","post","type-post","status-publish","format-standard","hentry","category-tech-tips"],"blocksy_meta":[],"_links":{"self":[{"href":"http:\/\/www.twtip.com\/index.php?rest_route=\/wp\/v2\/posts\/407","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.twtip.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.twtip.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.twtip.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.twtip.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=407"}],"version-history":[{"count":1,"href":"http:\/\/www.twtip.com\/index.php?rest_route=\/wp\/v2\/posts\/407\/revisions"}],"predecessor-version":[{"id":417,"href":"http:\/\/www.twtip.com\/index.php?rest_route=\/wp\/v2\/posts\/407\/revisions\/417"}],"wp:attachment":[{"href":"http:\/\/www.twtip.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=407"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.twtip.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=407"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.twtip.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=407"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}